Introduction: Growing Interest in Precise Actuators. Types of Precise Actuators. Applications of Precise Actuators. Nonlinear Dynamics and Modeling: Hysteresis. Creep. Friction. Force Ripples. Identification and Compensation of Preisach Hysteresis in Piezoelectric Actuators: SVD-Based Identification and Compensation of Preisach Hysteresis. High-Bandwidth Identification and Compensation of Hysteretic Dynamics in Piezoelectric Actuators. Concluding Remarks. Identification and Compensation of Friction and Ripple Force: Relay Feedback Techniques for Precision Motion Control. Identification and Compensation of Friction Model. Modeling and Compensation of Ripples and Friction in Permanent Magnet Linear Motors. Model Predictive Control of Precise Actuators: Model Predictive Control Concepts for Motion Tracking. Hybrid MPC for Ultrasonic Motors. From Parametric MPC to PID Gain Scheduling Controllers. Simulation Study and Experiment Results. Concluding Remarks. Modeling and Control of Air Bearing Stages: Problem Statements. Control of Linear Air Bearing Stage. Controller Design for the System. Experimental Results. Control of Spherical Air Bearing Stage. Performance Analysis of Spherical Air Bearing System. Concluding Remarks. Fault Detection and Accommodation in Actuators: Problem Statements. Types of Failure. Fault Diagnosis Scheme. Control of the System under No Fault Condition. Accommodation Control After Fault Detection. Extension to Output Feedback Control Design. Experimental Tests. Concluding Remarks. Case Studies of Precise Actuator Applications: Robust Adaptive Control of Piezoelectric Actuators with an Application to Intracytoplasmic Sperm Injection. Control of a 2-DOF Ultrasonic Piezomotor Stage for Grommet Insertion. Vision-Based Tracking and Thermal Monitoring of Non-Stationary Targets.