Foundation of MEMS

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Beschreibung

For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

Artikeldetails

EAN

9780273752240

Sprache

Englisch

Einband / Art

Taschenbuch

Maße

235 x 178 x 31 mm

Erscheinungsjahr

2026

Verlag / Hersteller

Pearson